Hy-Lok HPGR-400&800 Series Valves
Applications
Ultra High Pure Gas Line, Semiconductor Hook-Up Line, Bulk Gas Line
Features
Metal to Metal Diaphragm Seals Leak Tight Integrity
Internal Surface EP 10 Ra or 5 Ra micro-inch
All Performed in Class 10 Clean Room
Available for Semiconductor Applications
Specifications
- Maximum Inlet Pressure :
600 psig (41 bar)
- Outlet Pressure Range :
0-60 psig (0-4 bar), 0-100 psig (0-7 bar),
0-150 psig (0-10 bar), 0-250 psig (1-17 bar)
- Operating Temperature Range :
-15℉ (-26℃) to 176℉ (80℃)